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Picometer-Precision Atomic Position Tracking through Electron Microscopy
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Electron ptychography achieves atomic-resolution limits set by lattice vibrations.

Zhen Chen1, Yi Jiang2, Yu-Tsun Shao3

  • 1School of Applied and Engineering Physics, Cornell University, Ithaca, NY 14853, USA. zhen.chen@cornell.edu david.a.muller@cornell.edu.

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Electron ptychography overcomes lens aberrations and scattering in transmission electron microscopy. This technique achieves sub-20-picometer resolution, enabling atomic-scale imaging and 3D dopant atom localization.

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Area of Science:

  • Materials Science
  • Physics
  • Microscopy

Background:

  • Transmission electron microscopes (TEM) offer atomic resolution potential due to short electron wavelengths.
  • Image quality is degraded by lens aberrations and electron multiple scattering in samples.
  • Current TEM resolution is significantly limited compared to the intrinsic size of atoms.

Purpose of the Study:

  • To overcome limitations in TEM resolution caused by lens aberrations and multiple scattering.
  • To demonstrate a method for achieving near-intrinsic atomic resolution imaging.
  • To enable precise 3D localization of dopant atoms within materials.

Main Methods:

  • Utilized electron ptychography, a computational imaging technique.
  • Developed methods to inversely solve the electron multiple scattering problem.
  • Corrected for electron-probe aberrations inherent in TEM.

Main Results:

  • Achieved instrumental blurring of less than 20 picometers.
  • Demonstrated a linear phase response even in thick samples.
  • Measured atomic column widths limited only by atomic thermal fluctuations.
  • Successfully located embedded atomic dopant atoms in 3D with subnanometer precision from a single measurement.

Conclusions:

  • Electron ptychography significantly enhances TEM resolution by correcting aberrations and scattering.
  • The developed method allows for imaging close to the theoretical atomic limit.
  • Precise 3D atomic dopant analysis is feasible with this advanced microscopy technique.