S- to X-Band Stretchable Inductors and Filters for Gigahertz Soft and Epidermal Electronics

To fulfill the increasing demand for radiofrequency (RF) wireless communication capacity for epidermal electronics, stretchable integrated circuits (ICs) in the gigahertz (GHz) range are desirable. Lumped RF inductors, as a key component in RFICs, typically dominate a large portion of the circuit/chip area and therefore make such inductors mechanically stretchable is critical for GHz-frequency stretchable RFICs. Most of the reported stretchable inductors operate in the MHz frequency range. The only GHz stretchable inductor shows a quality factor of about 2, limiting its potential RF applications. Here, stretchable inductors with a high quality factor of Q > 12.6 and resonance operation frequency of f_res > 11.6 GHz are demonstrated by combining microspirals with stretchable structures, overcoming all of the shortcomings of previous demonstrations. Furthermore, a stretchable 1.5-2.6 GHz filter with a peak insertion loss of -2.3 dB at 1.8 GHz is developed, showing negligible performance changes under stretching or on the skin to demonstrate the utility in practical wireless applications like GSM and Bluetooth (2.45 GHz) bands. The demonstrations can facilitate multiple GHz epidermal RFICs in the future.