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Published on: November 9, 2015
Study on machining characteristics of magnetically controlled laser induced plasma micro-machining single-crystal
Yanming Zhang1,2, Zhen Zhang3,4, Yi Zhang3
1State Key Lab of Digital Manufacturing Equipment & Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, Hubei 430074, PR China.
Introduction:
Laser induced plasma micro-machining (LIPMM) has proved its superiority in micro-machining of hard and brittle materials due to less thermal defects, smaller heat affected zone and larger aspect ratio compared to conventional laser ablation.
Objectives:
In order to improve characteristics and stability of induced plasma, this paper proposed magnetically controlled LIPMM (MC-LIPMM) to achieve a good performance of processing single-crystal silicon which is widely used in solid state electronics and infrared optical applications.
Methods:
A comprehensive study on surface integrity and geometrical shape was conducted based on the experimental method. Firstly, the mechanism of MC-LIPMM including laser-plasma, laser-materials interactions and transport effects was theoretically analyzed. Then a series of experiments was conducted to completely investigate the effect of magnetic field intensity, pulse repetition frequency, and bubble behavior on surface integrity and geometrical shape of micro channels.
Results:
It revealed that magnetic field contributed to maximum reduction of 12.64% for heat affected zone and 62.57% for width while maximum increase of 26.23% for depth and 90.26% for aspect ratio.
Conclusion:
This research confirms that MC-LIPMM can improve the machining characteristics of silicon materials and cavitation bubbles shows an apparently negative impact on the surface morphology.
