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Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
Published on: December 7, 2015
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Deterministic transfer of optical-quality carbon nanotubes for atomically defined technology.
Keigo Otsuka1,2, Nan Fang3, Daiki Yamashita4
1Nanoscale Quantum Photonics Laboratory, RIKEN Cluster for Pioneering Research, Saitama, Japan. otsuka@photon.t.u-tokyo.ac.jp.
Nature Communications
|May 26, 2021
Summary
Researchers developed a dry transfer technique for precise carbon nanotube placement, enabling atomic-scale device fabrication. This method facilitates the creation of advanced electronic and photonic devices with controlled nanotube assembly.
Area of Science:
- Nanotechnology
- Materials Science
- Quantum Electronics
Background:
- Device scaling is approaching atomic limits, necessitating new fabrication methods for atomically precise structures.
- Current methods struggle with precise placement and contamination-free assembly of nanoscale building blocks.
- Carbon nanotubes (CNTs) offer unique electronic and optical properties for future devices.
Purpose of the Study:
- To develop a versatile dry transfer technique for deterministic placement of optical-quality carbon nanotubes.
- To demonstrate the precise assembly of CNTs for coupling with photonic structures.
- To explore intertube exciton transfer in fabricated CNT junctions.
Main Methods:
- Utilized single-crystalline anthracene as a sublimation medium for clean CNT release.
- Employed in-situ optical monitoring for sub-micron accuracy placement of desired chirality CNTs.
- Constructed cross-junction structures by repeating the dry transfer process.
Main Results:
- Achieved deterministic placement of optical-quality carbon nanotubes with high precision.
- Successfully demonstrated the coupling of a CNT to a photonic crystal nanobeam cavity.
- Observed intertube exciton transfer in the fabricated CNT cross-junction structure.
Conclusions:
- The dry transfer technique enables precise assembly of atomically precise components.
- This method is crucial for developing advanced devices utilizing carbon nanotubes.
- The findings represent a significant advancement towards atomically precise interfaces and devices.

