Accuracy and precision of position determination in ISTEM imaging of BaTiO₃

In this paper we study the effect of lens aberrations (spherical aberration and astigmatism), beam tilt, contamination and shot noise on the accuracy and precision of position determination in imaging scanning transmission electron microscopy (ISTEM) on the example of BaTiO₃. ISTEM images are simulated as a function of sample thickness and defocus starting from a nearly perfect microscope setting. A defocus range was identified, in which atom column positions were reliably visible and could be decently measured. By averaging over this defocus and thickness range a figure of merit was defined and used to study the influence of above mentioned disturbing effects as a function of their strength. It turned out that column positions might become inaccurate, but distances are measured accurately. These were used to obtain recommendations for the experimental setup to measure the atomic arrangement that induces ferroelectric switching of BaTiO₃.