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Correction of artefacts associated with large area EBSD.

B Winiarski1, A Gholinia2, K Mingard3

  • 1Department of Materials, University of Manchester, Manchester, M13 9PL, United Kingdom; Thermo Fisher Scientific, 62700 Brno, Czech Republic.

Ultramicroscopy
|May 28, 2021
PubMed
Summary

Large electron backscattered diffraction (EBSD) maps can have significant distortions. This study quantifies these errors in 3D EBSD data and proposes correction methods for accurate morphological interpretation.

Keywords:
Broad ion beam polishingCermetComputed tomography (CT)Serial block face sectioning electron microscopy (SBFSEM)electron back scatter diffractionfocused ion beam (FIB)

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Area of Science:

  • Materials Science
  • Microscopy
  • Crystallography

Background:

  • Electron Backscatter Diffraction (EBSD) is crucial for analyzing material microstructures.
  • Acquiring large 2D and 3D EBSD maps is increasingly common but prone to distortions.
  • These distortions, both long-range (drift) and short-range (topography), affect data accuracy.

Purpose of the Study:

  • To quantify geometric distortions in large-area 2D/3D EBSD datasets.
  • To investigate the impact of distortions on Serial Section Tomography (SST) data.
  • To propose methods for correcting EBSD map distortions.

Main Methods:

  • Acquisition of large-area 2D/3D EBSD maps on WCCo hardmetal.
  • Referencing EBSD data to Secondary Electron (SE) images for distortion quantification.
  • Analysis of distortions caused by sample/beam drift and topographical features.

Main Results:

  • Quantified long-range distortions up to ~10μm across 200μm x 175μm areas due to drift.
  • Observed short-range distortions up to ~3μm over 40μm distances from topographical effects.
  • Highlighted the prevalence of distortions in large datasets and SST.

Conclusions:

  • Geometric distortions are significant in large-area EBSD mapping, especially for 3D reconstructions.
  • Accurate morphological interpretation requires correction of these EBSD artifacts.
  • Proposed correction methods are essential for reliable analysis of 3D EBSD datasets.