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Ultra-sensitive silicon temperature sensor based on cascaded Mach-Zehnder interferometers
Optics Letters
|June 1, 2021
Summary
This study presents an ultra-sensitive silicon-on-insulator temperature sensor using cascaded Mach-Zehnder interferometers (MZIs). The novel design achieves high sensitivity without sacrificing detection range, outperforming conventional silicon sensors.
Area of Science:
- Photonics
- Integrated Optics
- Sensor Technology
Background:
- Accurate temperature sensing is crucial for various applications.
- Existing silicon-based temperature sensors often face limitations in sensitivity or detection range.
- Thermo-optic coefficient (TOC) materials can introduce complexity and limitations.
Purpose of the Study:
- To demonstrate an ultra-sensitive temperature sensor on a silicon-on-insulator (SOI) platform.
- To enhance sensitivity without compromising the detection range.
- To develop a sensor requiring only single lithography and avoiding negative TOC materials.
Main Methods:
- Utilizing cascaded Mach-Zehnder interferometers (MZIs) on the SOI platform.
- Tailoring geometric parameters of MZIs for similar free spectral ranges (FSRs) but distinct sensitivities.
- Implementing a single lithography process for the sensing unit.
Main Results:
- Achieved a measured sensitivity of 1753.7 pm/°C within the 27°C to 67°C range.
- Demonstrated sensitivity significantly higher than previously reported silicon-based sensors.
- Obtained a sensitivity approximately 21.9 times greater than conventional all-silicon temperature sensors.
Conclusions:
- The proposed cascaded MZI sensor offers ultra-high sensitivity on the SOI platform.
- The design successfully enhances temperature sensing performance without negative TOC materials.
- This approach provides a promising pathway for advanced integrated photonic temperature sensing.
