Ultra-Highly Sensitive Hydrogen Chloride Detection Based on Quartz-Enhanced Photothermal Spectroscopy

Combining the merits of non-contact measurement and high sensitivity, the quartz-enhanced photothermal spectroscopy (QEPTS) technique is suitable for measuring acid gases such as hydrogen chloride (HCl). In this invited paper, we report, for the first time, on an ultra-highly sensitive HCl sensor based on the QEPTS technique. A continuous wave, distributed feedback (CW-DFB) fiber-coupled diode laser with emission wavelength of 1.74 µm was used as the excitation source. A certified mixture of 500 ppm HCl:N₂ was adapted as the analyte. Wavelength modulation spectroscopy was used to simplify the data processing. The wavelength modulation depth was optimized. The relationships between the second harmonic (2f) amplitude of HCl-QEPTS signal and the laser power as well as HCl concentration were investigated. An Allan variance analysis was performed to prove that this sensor had good stability and high sensitivity. The proposed HCl-QEPTS sensor can achieve a minimum detection limit (MDL) of ~17 parts per billion (ppb) with an integration time of 130 s. Further improvement of such an HCl-QEPTS sensor performance was proposed.