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Integrating Resonator to Enhance Magnetometer Microelectromechanical System Implementation with ASIC Compatible CMOS

Chih-Hsuan Lin1, Chao-Hung Song1, Kuei-Ann Wen1

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Summary
This summary is machine-generated.

This study integrates a microelectromechanical system (MEMS) oscillator with a magnetometer, enhancing its dynamic range and sensitivity. The novel design eliminates external components and achieves high-resolution magnetic field measurements.

Keywords:
microelectromechanical systemsthree-axis accelerometerthree-axis magnetometer

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Area of Science:

  • Microelectromechanical Systems (MEMS)
  • Sensor Technology
  • Magnetometry

Background:

  • Traditional magnetometers often require external components like clocks and current generators, increasing system complexity and size.
  • Achieving a large dynamic range and high resolution simultaneously in magnetic field sensors presents a significant challenge.

Purpose of the Study:

  • To develop a multi-function microelectromechanical system (MEMS) magnetometer with an integrated MEMS oscillator.
  • To enhance the magnetometer's dynamic range and sensitivity by utilizing resonant frequency characteristics.
  • To reduce noise and improve resolution through advanced readout circuitry and calibration techniques.

Main Methods:

  • Integration of a MEMS oscillator with a magnetometer to leverage resonant frequency for Lorentz current generation.
  • Adjustment of resonant frequency via bias voltage to tune magnetometer sensitivity.
  • Utilization of nested chopper and correlated double-sampling (CDS) readout circuits for noise reduction.
  • Implementation of a calibration circuit to compensate for manufacturing process errors.

Main Results:

  • The proposed magnetometer exhibits a frequency tuning range of 17,720–19,924 Hz and a measurement tuning range of 110,620.36 ppm.
  • Sensitivities for x-, y-, and z-axes are 218.3, 74.33, and 7.5 μV/μT, respectively, at a 2 mA driving current.
  • Resolutions for x-, y-, and z-axes are 3.302, 9.69, and 96 nT/√Hz, respectively, demonstrating high precision.

Conclusions:

  • The integrated MEMS magnetometer offers a large dynamic range and high sensitivity by using resonant frequency oscillation.
  • The advanced readout and calibration circuits effectively reduce noise and compensate for errors, leading to improved measurement resolution.
  • This novel MEMS magnetometer design presents a compact and efficient solution for precise magnetic field sensing.