High-Precision Machining Method of Weak-Stiffness Mirror Based on Fast Tool Servo Error Compensation Strategy
Zelong Li1,2,3, Yifan Dai1,2,3, Chaoliang Guan1,2,3
1College of Intelligence Science and Technology, National University of Defense Technology, 109 Deya Road, Changsha 410073, China.
Micromachines
|June 2, 2021
Summary
This study introduces a novel machining method for delicate, weak-stiffness mirrors, achieving micron-level precision. The technique effectively compensates for clamping and cutting errors, significantly improving surface accuracy for aerospace and optoelectronics applications.
Area of Science:
- Mechanical Engineering
- Materials Science
- Optical Engineering
Background:
- Weak-stiffness mirrors are crucial in aerospace and optoelectronics but challenging to machine precisely due to deformation and random errors.
- Existing machining methods struggle with the inherent flexibility and non-rotational symmetry of these mirrors.
Purpose of the Study:
- To develop a high-precision machining method for weak-stiffness mirrors.
- To address challenges in clamping and cutting errors inherent in machining flexible optical components.
Main Methods:
- A fast tool servo system was employed for high-precision machining.
- A compensation strategy was developed by analyzing mirror surface morphology changes.
- Real-time monitoring and theoretical simulation were used to extract elastic deformation for clamping error compensation.
- Iterative machining was utilized for cutting error compensation.
Main Results:
- The machining process successfully compensated for initial clamping errors (5.2 µm PV) and cutting errors (1.6 µm PV).
- The final machined weak-stiffness mirror achieved a surface accuracy of 0.7 µm PV.
- The proposed compensation strategy significantly reduced machining errors.
Conclusions:
- The developed method enables high-precision machining of weak-stiffness mirrors, overcoming deformation and random error challenges.
- This technique is vital for advancing applications requiring ultra-precise optical components in demanding fields.
