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A thin-film temperature sensor based on a flexible electrode and substrate.

Zhaojun Liu1, Bian Tian1, Bingfei Zhang1

  • 1State Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi'an Jiaotong University, 710049 Xi'an, China.

Microsystems & Nanoengineering
|June 7, 2021
PubMed
Summary

A novel flexible micro-sensor using platinum and indium oxide thermocouples enables real-time temperature monitoring. This stable, reliable sensor advances bio-robotics and healthcare, with potential applications in smart masks for health data collection.

Keywords:
Electrical and electronic engineeringPhysics

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Area of Science:

  • Materials Science
  • Sensor Technology
  • Nanotechnology

Background:

  • Accurate temperature measurements are crucial for solving critical problems and providing essential data.
  • Existing temperature sensors may lack the flexibility and real-time capabilities required for advanced applications.
  • The integration of microfabrication techniques offers potential for novel sensor designs.

Purpose of the Study:

  • To design and fabricate a flexible micro-three-dimensional temperature sensor.
  • To achieve in situ, real-time temperature measurements with enhanced stability and reliability.
  • To explore the sensor's application in emerging fields like bio-robotics and healthcare systems.

Main Methods:

  • Fabrication of a micro-three-dimensional sensor using a microfabrication process.
  • Utilizing a combination of platinum and indium oxide to form thermocouples.
  • Optimization of process parameters, structural design, and preparation methods to enhance sensor performance.

Main Results:

  • A flexible micro-three-dimensional temperature sensor with improved malleability and fast response time was successfully fabricated.
  • The sensor demonstrated excellent stability and reliability through optimized design and fabrication.
  • The sensor's potential for in situ, real-time temperature measurements was confirmed.

Conclusions:

  • The developed flexible temperature sensor offers significant improvements in stability and reliability.
  • This sensor is poised to contribute to advancements in bio-robotics and healthcare systems.
  • A proposed mask application highlights the potential for health information collection and timely medical intervention.