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Structural and compositional analysis of (InGa)(AsSb)/GaAs/GaP Stranski-Krastanov quantum dots
Raja S R Gajjela1, Arthur L Hendriks2, James O Douglas3
1Department of Applied Physics, Eindhoven University of Technology, 5612 AZ, Eindhoven, The Netherlands. r.s.r.gajjela@tue.nl.
Light, Science & Applications
|June 15, 2021
Summary
We studied InGaSb/GaAs quantum dots (QDs) for QD-Flash memory using advanced microscopy. Sb acts as a surfactant, and intermixing is key for QD formation and device performance.
Area of Science:
- Semiconductor physics
- Materials science
- Nanotechnology
Background:
- Quantum dots (QDs) are crucial for next-generation electronic devices.
- Understanding QD composition and structure is vital for optimizing performance.
- Metal-organic vapor phase epitaxy (MOVPE) is a common method for QD growth.
Purpose of the Study:
- To investigate the structural and compositional properties of InGaSb/GaAs quantum dots.
- To analyze the role of antimony (Sb) as a surfactant in QD formation.
- To provide insights for optimizing QD-Flash memory devices.
Main Methods:
- Cross-sectional scanning tunneling microscopy (X-STM) for atomic-resolution imaging.
- Atom probe tomography (APT) for detailed compositional analysis.
- Finite element (FE) simulations to determine lattice constants and surface relaxation.
Main Results:
- QDs exhibit a truncated pyramid shape with high density (∼4×1011 cm-2).
- QDs are GaAs-rich with significant In and Sb content (InxGa1-xAs1-ySby, x=0.25-0.30, y=0.10-0.15).
- Antimony (Sb) segregates to the QD capping layer, acting as a surfactant, while In and Ga intermix within the QDs.
Conclusions:
- The study provides a comprehensive structural and compositional analysis of InGaSb/GaAs QDs.
- Antimony's surfactant role and significant intermixing are critical for QD formation.
- Findings offer a pathway for optimizing QD-Flash memory storage time.

