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High quality, high index-contrast chalcogenide microdisk resonators.

Rizhen Zhang, Zhen Yang, Mingyue Zhao

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    |June 22, 2021
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    We fabricated high quality factor microdisk resonators using chalcogenide glass (ChG) for advanced photonic applications. These resonators achieve a loaded Q factor of 5x105, enabling efficient light manipulation.

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    Area of Science:

    • Photonics and Optical Engineering
    • Materials Science
    • Nanotechnology

    Background:

    • High quality factor (Q) microdisk resonators are crucial for various photonic applications, including sensing and communication.
    • Chalcogenide glasses (ChG) offer unique optical properties but require advanced fabrication techniques for high-performance devices.

    Purpose of the Study:

    • To demonstrate high-Q microdisk resonators in a high index-contrast chalcogenide glass (GeSbSe).
    • To explore different coupling mechanisms and characterize the thermo-optic properties of these resonators.

    Main Methods:

    • Fabrication of microdisk resonators using electron-beam lithography and plasma dry etching on GeSbSe films.
    • Characterization of optical performance, including Q factor and mode excitation.
    • Thermal characterization to determine the thermo-optic coefficient.

    Main Results:

    • Achieved loaded Q factors up to 5x105 for single-point-coupled microdisk resonators.
    • Demonstrated pulley-coupled resonators for relaxed fabrication tolerances.
    • Successfully excited specific microdisk radial modes by phase-matching coupling waveguides.
    • Measured a thermo-optic coefficient of 6.7x10-5/K for bulk ChG.

    Conclusions:

    • High-Q microdisk resonators can be successfully fabricated from GeSbSe chalcogenide glass.
    • The demonstrated resonators offer high light confinement and low loss, suitable for integrated photonics.
    • The thermo-optic properties are quantified, providing essential data for device design and thermal management.