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Updated: Nov 1, 2025

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
09:46

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Published on: August 8, 2025

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Publisher Correction: Laser-excited elastic guided waves reveal the complex mechanics of nanoporous silicon

Marc Thelen1, Nicolas Bochud2, Manuel Brinker1

  • 1Hamburg University of Technology, Institute of Materials and X-Ray Physics, Hamburg, Germany.

Nature Communications
|June 23, 2021
PubMed
Abstract

No abstract available in PubMed .

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