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Random Telegraph Noise in 3D NAND Flash Memories
Alessandro S Spinelli1, Gerardo Malavena1, Andrea L Lacaita1
1Dipartimento di Elettronica, Informazione e Bioingegneria, Politecnico di Milano, 20133 Milan, Italy.
Micromachines
|July 2, 2021
Summary
This paper reviews random telegraph noise (RTN) in 3D NAND Flash memory. It explains how polycrystalline silicon channels and grain boundaries in 3D architectures impact RTN behavior and current transport.
Area of Science:
- Solid State Physics
- Semiconductor Device Physics
- Materials Science
Background:
- 3D NAND Flash arrays are mainstream memory technologies.
- Current transport in these arrays is influenced by the polycrystalline nature of silicon channels.
- Random Telegraph Noise (RTN) is a significant phenomenon affecting device performance.
Purpose of the Study:
- To review the phenomenology of RTN in 3D NAND Flash arrays.
- To discuss the impact of 3D architectures on RTN characteristics compared to planar devices.
- To explain the underlying physical mechanisms causing RTN in 3D NAND.
Main Methods:
- Review of experimental data on RTN in 3D NAND Flash arrays.
- Application of theoretical and simulation models to explain RTN phenomena.
- Analysis of the influence of polycrystalline silicon channels and grain boundaries on current transport.
Main Results:
- RTN behavior in 3D NAND arrays is significantly influenced by polycrystalline silicon channels.
- The transition from planar to 3D architectures leads to changes in RTN dependence on operating conditions.
- Highly-defective grain boundaries play a crucial role in percolative current transport and localized RTN.
Conclusions:
- The unique features of 3D NAND architectures, particularly grain boundaries, alter RTN characteristics.
- Understanding these changes is vital for optimizing 3D NAND Flash memory reliability and performance.
- RTN in 3D NAND is a complex interplay between material properties and device architecture.
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