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Fast and Deterministic Fabrication of Sub-5 Nanometer Solid-State Pores by Feedback-Controlled Laser Processing.

Eran Zvuloni1, Adam Zrehen1, Tal Gilboa2,3

  • 1Department of Biomedical Engineering, Technion-IIT, Haifa 32000, Israel.

ACS Nano
|July 5, 2021
PubMed
Summary

Laser drilling (LD) offers a fast, automated method for creating precise nanopores in silicon nitride membranes. This technique enhances throughput and accuracy for nanopore-based biomolecular sensing applications.

Keywords:
laser drillingphotochemical etchingphotoluminescencesingle-molecule sensingsolid-state nanopores

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Area of Science:

  • Materials Science
  • Biotechnology
  • Nanotechnology

Background:

  • Nanopores are versatile single-molecule sensors for biomolecules like DNA and proteins.
  • Synthetic nanopores in silicon nitride offer stability for genomics and proteomics applications.
  • Current fabrication methods lack speed, reliability, and determinism for sub-5 nm nanopores.

Purpose of the Study:

  • To develop a fast, reliable, and deterministic method for fabricating nanopores.
  • To demonstrate a fully automatic nanopore fabrication process using laser drilling (LD).
  • To achieve user-defined nanopore sizes with high accuracy and throughput.

Main Methods:

  • Utilized a tightly focused laser beam to induce controlled etching of silicon nitride membranes.
  • Optimized optical apparatus and developed a multistep control algorithm for automated LD.
  • Investigated the resulting nanopore structure and conductance using numerical simulations.

Main Results:

  • Demonstrated deterministic fabrication of nanopores to prespecified sizes without user intervention.
  • Achieved fully automatic nanopore fabrication within minutes for user-defined sizes.
  • LD process creates double bowl-shaped nanopores, validated by simulations matching experimental conductance curves.

Conclusions:

  • Laser drilling (LD) provides a significant advancement in nanopore fabrication throughput and accuracy.
  • The automated LD method is suitable for various biomolecular sensing applications.
  • The technique overcomes previous bottlenecks in creating small, precise nanopores.