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Updated: Oct 29, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
Noise investigation of an electrostatic accelerometer by a high-voltage levitation method combined with a
Shuang Hu1, Shixun Pei1, Ming Hu2
1MOE Key Laboratory of Fundamental Physical Quantities Measurement, Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China.
Abstract:
A high precision electrostatic accelerometer has widely been employed to measure gravity gradients and detect gravitational waves in space. The high-voltage levitation method is one of the solutions for testing electrostatic accelerometers on the ground, which aims at simultaneously detecting all six-degree-of-freedom movements of the electrostatic accelerometers engineering and flight prototypes. However, the noise performance in the high-voltage levitation test is mainly limited by seismic noise. The combined test of the accelerometer and vibration isolation platform is adopted to improve the detection precision of the high-voltage levitation method. In this paper, a high precision electrostatic accelerometer prototype is developed after designed appropriate mechanical parameters with a test mass weighing 300 g and with an estimated resolution of 2 × 10-12 m/s2/Hz1/2 from 0.01 to 0.4 Hz. Such a prototype is tested by the high-voltage levitation method, its measurement noise on the ground is mainly limited by the seismic noise, which is about 5 × 10-7 m/s2/Hz1/2 around 0.2 Hz and about 4 × 10-8 m/s2/Hz1/2 around 0.1 Hz. A vibration isolation pendulum bench based on the translation-tilt compensation principle is adopted for accelerometer prototype combined tests to suppress the seismic noise, which has a large bench area and the ability to adjust the tilt angle precisely. The measured accelerometer noise of the combined test with the translation-tilt compensation pendulum has reached 3 × 10-9 m/s2/Hz1/2 around 0.2 Hz, and it is about two orders of magnitude lower than the measurement noise on the ground. The combined test method provides technical guidance for further improving the noise level of ground test in the future.
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