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Updated: Oct 28, 2025
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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
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Compression-coding-based surface measurement using a digital micromirror device and heterodyne interferometry of an
Optics Express
|July 16, 2021
Summary
This study introduces a fast surface measurement technique using single-pixel imaging and optical frequency combs. It achieves high precision (5 nm) and reduces measurement time fivefold for simple surfaces.
Area of Science:
- Optical Metrology
- Imaging Science
- Precision Engineering
Background:
- Accurate surface profiling is crucial for manufacturing and research.
- Traditional methods can be slow or require complex setups.
- Need for rapid, high-precision surface measurement techniques.
Purpose of the Study:
- To develop a compression-coding-based method for rapid surface measurement.
- To combine single-pixel imaging with heterodyne interference for enhanced depth sensing.
- To achieve high-precision surface reconstruction with reduced measurement time.
Main Methods:
- Utilizing an optical frequency comb for heterodyne interference.
- Employing single-pixel imaging with optimized Hadamard measurement basis.
- Extracting depth information from real and imaginary parts of interference signals.
Main Results:
- Reconstructed a three-step sample (10-30 µm heights) in 6 ms with 5 nm precision.
- Reduced sampling time to 20% and measurement time by five times compared to uncompressed methods.
- Demonstrated high accuracy without iterative operations.
Conclusions:
- The proposed method offers a significant speed improvement for surface measurements.
- Effective for rapid, high-precision profiling of objects with simple surface topographies.
- Potential applications in quality control and micro-fabrication.
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