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Picometer-Precision Atomic Position Tracking through Electron Microscopy
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Picometer-Precision Atomic Position Tracking through Electron Microscopy.

Leixin Miao1, Adrian Chmielewski1, Debangshu Mukherjee2

  • 1Department of Materials Science & Engineering, The Pennsylvania State University.

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|July 19, 2021
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Summary

Advanced scanning transmission electron microscopy (STEM) image analysis is now possible. This study presents a complete pathway for metrology of atomic resolution STEM images, including a free MATLAB app (EASY-STEM) for enhanced material characterization.

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Electron Microscopy

Background:

  • Aberration-corrected scanning transmission electron microscopy (AC-STEM) enables sub-angstrom resolution imaging of atomic columns.
  • Advanced quantification and analysis of these high-resolution images remain underdeveloped.

Purpose of the Study:

  • To present a comprehensive methodology for the metrology of atomic resolution scanning transmission electron microscopy (STEM) images.
  • To introduce a user-friendly MATLAB application (EASY-STEM) for streamlined STEM image analysis.

Main Methods:

  • Acquisition of high-quality STEM images.
  • Image denoising and drift correction for improved accuracy.
  • Atomic position determination using 2D-Gaussian fitting or multi-peak fitting for overlapping columns.
  • Lattice distortion and strain quantification.
  • Visualization and presentation techniques.

Main Results:

  • A complete workflow for STEM image metrology is established.
  • The EASY-STEM MATLAB app provides a graphical user interface for analysis.
  • Methods allow for quantification of local defect relaxations, structural distortions, phase transformations, and non-centrosymmetry.

Conclusions:

  • The presented pathway and EASY-STEM tool significantly advance the quantitative analysis of atomic resolution STEM images.
  • This methodology is applicable to a wide range of materials for detailed structural characterization.