Compensating nonlinear temperature dependence of ultrasonic motor

Xue Qi1, Weijia Shi1, Shaokai Wang1

  • 1Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China; Key Lab of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China.

Ultrasonics
|July 27, 2021
PubMed

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