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Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization

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Projection-type electron spectroscopy collimator analyzer for charged particles and x-ray detections.

Fumihiko Matsui¹, Hiroyuki Matsuda¹

¹UVSOR Synchrotron Facility, Institute for Molecular Science, Okazaki, Aichi 444-8585, Japan.

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|August 3, 2021

Summary

We created a compact device for analyzing charged particle energy and angle over a wide field of view. This electron-optical system achieves high angular resolution for surface emission measurements.

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Area of Science:

Physics
Materials Science
Analytical Chemistry

Background:

Characterizing charged particle emission requires precise angular and energy analysis.
Existing methods often lack wide acceptance angles or high resolution.

Purpose of the Study:

To develop a compact, high-resolution device for analyzing charged particle angular and energy distributions.
To enable efficient two-dimensional angular distribution measurements of emitted electrons and ions.

Main Methods:

Utilized an electrostatic lens with an axisymmetric aspherical mesh and electrodes to parallelize electron trajectories.
Incorporated planar grids or a collimator plate as an energy band-pass filter.
Employed microchannel plates and a fluorescent screen for direct projection of angular distribution.

Main Results:

Achieved a wide acceptance cone angle of nearly 1π steradian.
Demonstrated parallelization of electron trajectories for perpendicular entry into the energy filter.
Enabled direct projection of angular distribution onto a screen without a pinhole, ensuring high angular resolution.

Conclusions:

The developed device offers a simple yet significant electron-optical design for wide-range angular distribution analysis.
The analyzer is well-suited for two-dimensional angular distribution measurements of charged particles emitted from surfaces.
This compact instrument enhances the capability for detailed surface analysis in various scientific fields.