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A piezoelectric micro-cantilever acoustic vector sensor designed considering fluid-structure interaction.

Junsoo Kim1, Seongkwan Yang1, Keunha Oh1

  • 1Department of Mechanical Engineering, Pohang University of Science and Engineering, 77 Cheongam-Ro, Pohang 37673, South Korea.

The Journal of the Acoustical Society of America
|August 3, 2021
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Summary

A novel piezoelectric micromachined cantilever acoustic vector (PEMCAV) sensor was developed. This acoustic vector sensor accurately measures sound direction and frequency response, even at small scales.

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Area of Science:

  • Acoustic sensing technology
  • MEMS (Micro-Electro-Mechanical Systems) sensors
  • Piezoelectric transduction

Background:

  • Traditional acoustic sensors often lack directional capabilities or are bulky.
  • Accurate measurement of acoustic vector fields is crucial for various applications, including underwater acoustics and noise source identification.
  • The influence of fluid-structure interaction is significant for flexible sensors and must be accounted for in theoretical models.

Purpose of the Study:

  • To develop and characterize a novel piezoelectric micromachined cantilever acoustic vector (PEMCAV) sensor.
  • To theoretically model the PEMCAV sensor, incorporating fluid-structure interaction, piezoelectric effect, and mechanical impedance.
  • To optimize the sensor's design parameters for enhanced performance and validate the model with experimental data.

Main Methods:

  • Developed a lumped element model for the PEMCAV sensor, including fluid-structure interaction.
  • Fabricated the sensor using micromachining techniques and integrated a preamplifier.
  • Tested the sensor's frequency response and directivity from 100 Hz to 1 kHz using a reference hydrophone.

Main Results:

  • The analytical model showed good agreement with experimental results for frequency response and directivity.
  • The PEMCAV sensor exhibited a cosine directivity pattern, even when significantly smaller than the acoustic wavelength (ka≪1).
  • Measured sensitivity at 100 Hz was -194 dBV/μPa.

Conclusions:

  • The developed PEMCAV sensor offers a viable solution for acoustic vector sensing with high sensitivity and directional accuracy.
  • The theoretical model accurately predicts the sensor's performance, enabling optimized design for specific applications.
  • The micromachined sensor demonstrates potential for miniaturized and effective acoustic measurements across various fields.