Manufacture of Hemispherical Shell and Surrounding Eave-Shaped Electrodes

Area of Science:

• Physics
• Materials Science
• Mechanical Engineering

Background:

• Hemispherical resonators are sensitive to shell asymmetry and electrode gap distance, affecting performance.
• Achieving symmetry and small, uniform gaps is crucial for optimal resonator function.

Purpose of the Study:

• To develop a micro-hemispherical resonator (μHR) with improved symmetry and controlled electrode gaps.
• To investigate the feasibility of using a glassblowing process for μHR fabrication.

Main Methods:

• Fabrication of a μHR structure using a glassblowing process, incorporating sandwich-shaped stacks and eave-shaped electrodes.
• Precise control of hemispherical shell and electrode positioning to achieve uniform, small gaps.
• Development of a non-destructive method for estimating shell thickness.

Main Results:

• The glassblowing process yielded favorable surface roughness and symmetry for the hemispherical shell.
• Uniform and small gaps between the shell and electrodes were successfully realized.
• A non-destructive shell thickness estimation method demonstrated a deviation below 5%.

Conclusions:

• The developed μHR structure with eave-shaped electrodes is promising for hemispherical resonator applications.
• The fabrication method offers precise control over critical structural parameters.
• Further consideration of asymmetry, surface roughness, and gap is essential for resonator optimization.