Effect of Nano-Y₂O₃ Content on Microstructure and Mechanical Properties of Fe18Cr Films Fabricated by RF Magnetron...

In this work, FeCr-based films with different Y₂O₃ contents were fabricated using radio frequency (RF) magnetron sputtering. The effects of Y₂O₃ content on their microstructure and mechanical properties were investigated through scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray photoelectron spectroscopy (XPS), inductive coupled plasma emission spectrometer (ICP) and a nanoindenter. It was found that the Y₂O₃-doped FeCr films exhibited a nanocomposite structure with nanosized Y₂O₃ particles uniformly distributed into a FeCr matrix. With the increase of Y₂O₃ content from 0 to 1.97 wt.%, the average grain size of the FeCr films decreased from 12.65 nm to 7.34 nm, demonstrating a grain refining effect of Y₂O₃. Furthermore, the hardness of the Y₂O₃-doped FeCr films showed an increasing trend with Y₂O₃ concentration, owing to the synergetic effect of dispersion strengthening and grain refinement strengthening. This work provides a beneficial guidance on the development and research of composite materials of nanocrystalline metal with a rare earth oxide dispersion phase.