Fabrication of Large-Area Molybdenum Disulfide Device Arrays Using Graphene/Ti Contacts

Two-dimensional (2D) molybdenum disulfide (MoS₂) is the most mature material in 2D material fields owing to its relatively high mobility and scalability. Such noticeable properties enable it to realize practical electronic and optoelectronic applications. However, contact engineering for large-area MoS₂ films has not yet been established, although contact property is directly associated to the device performance. Herein, we introduce graphene-interlayered Ti contacts (graphene/Ti) into large-area MoS₂ device arrays using a wet-transfer method. We achieve MoS₂ devices with superior electrical and photoelectrical properties using graphene/Ti contacts, with a field-effect mobility of 18.3 cm²/V∙s, on/off current ratio of 3 × 10⁷, responsivity of 850 A/W, and detectivity of 2 × 10¹² Jones. This outstanding performance is attributable to a reduction in the Schottky barrier height of the resultant devices, which arises from the decreased work function of graphene induced by the charge transfer from Ti. Our research offers a direction toward large-scale electronic and optoelectronic applications based on 2D materials.