Rapid Prototyping of Inertial MEMS Devices through Structural Optimization.

Area of Science:

• Engineering
• Mechanical Engineering
• Materials Science

Background:

• Microelectromechanical systems (MEMS) are crucial for inertial sensing.
• Current design processes for MEMS can be time-consuming, hindering rapid prototyping.
• Efficient simulation and optimization tools are needed for complex MEMS devices.

Purpose of the Study:

• To present feMEMSlite, a novel and computationally efficient design and optimization environment for inertial MEMS devices.
• To enable flexible and rapid prototyping of MEMS through device-level schematization.
• To optimize MEMS gyroscope design focusing on eigenfrequencies and response to angular rates.

Main Methods:

• Developed feMEMSlite for parametric geometry generation, dynamic behavior simulation, and gradient-based layout optimization.
• Employed a device-level schematization: proof masses as rigid bodies, flexural springs as Timoshenko beam finite elements.
• Incorporated electrostatic softening effects via negative spring constants.

Main Results:

• Successfully applied feMEMSlite to a triaxial beating-heart MEMS gyroscope.
• Optimized designs met industry requirements, tuning structural eigenfrequencies and maximizing response to angular rates.
• Rapidly prototyped layouts demonstrated good performance when validated with full FEM models.

Conclusions:

• feMEMSlite provides a flexible, efficient, and computationally advantageous tool for inertial MEMS design and optimization.
• The device-level schematization approach allows for rapid prototyping with minimal adjustments for physical design.
• This methodology is particularly effective for complex MEMS devices like gyroscopes, accelerating the design cycle.