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Implementation of a Reference Interferometer for Nanodetection
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Pragmatic Micrometre to Millimetre Calibration Using Multiple Methods for Low-Coherence Interferometer in Embedded

Tom Hovell1, Jon Petzing1, Laura Justham1

  • 1Wolfson School of Mechanical, Electrical and Manufacturing Engineering, Loughborough University, Loughborough LE11 3TU, UK.

Sensors (Basel, Switzerland)
|August 10, 2021
PubMed

Keywords:
calibrationlow-coherence interferometrymetrology

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