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Method for acquiring accurate coordinates of the source point in electron backscatter diffraction.

Yongsheng Zhang1,2, Yitian Shen1,2, Fan Peng1,2

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|August 12, 2021
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Summary
This summary is machine-generated.

Accurate source point positioning in electron backscatter diffraction (EBSD) is crucial for precise crystal analysis. This study developed a sub-pixel positioning method, significantly improving interplanar angle calculation accuracy in EBSD systems.

Keywords:
EBSDcoordinates variation with beam movementinterplanar angle calculationpattern indexscreen moving methodsource point

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Area of Science:

  • Materials Science
  • Crystallography
  • Electron Microscopy

Background:

  • Electron Backscatter Diffraction (EBSD) is vital for determining crystal structure orientation and phase content.
  • Accurate pattern indexing, including interplanar angle calculation, is essential for EBSD data acquisition.
  • Source point coordinates are critical for interplanar angle calculations and are sensitive to incident beam movement.

Purpose of the Study:

  • To develop a precise method for source point positioning in EBSD.
  • To establish a relationship between source point coordinate variations and incident beam movement.
  • To enhance the accuracy of interplanar angle calculations in EBSD.

Main Methods:

  • Combined grey gradient calculation with a screen moving method for sub-pixel source point localization.
  • Determined source point coordinates with high precision (errors of 0.07%, 0.06%, 0.04%).
  • Established a direct correlation between source point coordinate variations and incident beam displacement.

Main Results:

  • Achieved sub-pixel precision in source point coordinate determination.
  • Demonstrated a maximum error of 0.53° in interplanar angle calculations using the new positioning method.
  • Validated a highly accurate relationship between source point coordinates and beam movement, with a maximum interplanar angle error of 0.81°.

Conclusions:

  • The developed grey gradient and screen moving method enables accurate sub-pixel source point positioning for EBSD.
  • The established relationship between source point coordinates and beam movement allows for direct calculation based on beam displacement.
  • This advancement significantly improves the accuracy of crystallographic analysis using electron backscatter diffraction.