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Shadow-wall lithography of ballistic superconductor-semiconductor quantum devices
Sebastian Heedt1,2, Marina Quintero-Pérez3, Francesco Borsoi4
1QuTech and Kavli Institute of Nanoscience, Delft University of Technology, Delft, The Netherlands. Sebastian.Heedt@Microsoft.com.
Nature Communications
|August 14, 2021
Summary
We developed a new shadow wall fabrication method for high-quality superconductor-semiconductor quantum devices and topological qubits. This technique enhances reproducibility and preserves delicate interfaces for advanced quantum computing applications.
Area of Science:
- Quantum Computing
- Condensed Matter Physics
- Nanotechnology
Background:
- Realizing hybrid superconductor-semiconductor quantum devices, including topological qubits, requires advanced fabrication techniques.
- Existing methods often struggle with reproducibility and preserving the integrity of delicate hybrid interfaces.
Purpose of the Study:
- To introduce a novel on-chip fabrication paradigm using shadow walls.
- To improve the quality and reproducibility of superconductor-semiconductor hybrid devices.
- To facilitate the development of topological qubits.
Main Methods:
- Implementation of an on-chip fabrication paradigm utilizing shadow walls.
- Elimination of critical fabrication steps like lithography and etching to preserve interface homogeneity.
- Fabrication of nanowire Josephson junctions and 3-terminal devices.
Main Results:
- Achieved substantial advances in device quality and reproducibility.
- Demonstrated devices with a hard induced superconducting gap and ballistic normal-/superconductor junctions.
- Observed large gate-tunable supercurrents and high-order multiple Andreev reflections, indicating exceptional coherence.
- Observed concurrent emergence of zero-bias conductance peaks at both boundaries of 1D hybrids in a magnetic field.
Conclusions:
- The shadow wall fabrication approach simplifies the reproducible creation of high-quality hybrid quantum devices.
- This method is critical for preserving fragile hybrid interfaces, enabling robust topological qubit realization.
- The demonstrated device coherence and properties pave the way for advanced quantum information processing.

