Synthesis and Nanomechanical Properties of Polystyrene/Silica Core/Shell Particles Via Atomic Force Microscopy

Due to the unique properties of core/shell particles, these structures have been considered in various applications. Employing core/shell particles consisting of a polymer core and a ceramic shell as an abrasive in a chemical mechanical planarization (CMP) process enhanced the quality of processed wafers. In the present study, polystyrene/silica core/shell particles were synthesized and the elastic modulus was examined via atomic force microscopy (AFM). The impact of the indentation depth and contact mechanics models on the elastic modulus was studied. Also, the plastic properties of particles were examined for the first time. Using the Hertz model and a diamond-like carbon (DLC) probe, the elastic moduli of the polymer and core/shell particles were measured at 2.82 ± 0.03 and 6.53 ± 0.05 GPa, respectively.