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Related Experiment Video

Updated: Oct 22, 2025

Design and Development of a Three-Dimensionally Printed Microscope Mask Alignment Adapter for the Fabrication of Multilayer Microfluidic Devices

Design and Development of a Three-Dimensionally Printed Microscope Mask Alignment Adapter for the Fabrication of Multilayer Microfluidic Devices

Published on: January 25, 2021

Micromask Lithography for Cheap and Fast 2D Materials Microstructures Fabrication.

Mikhail V Pugachev¹, Aliaksandr I Duleba¹, Arslan A Galiullin²

¹P.N. Lebedev Physical Institute of the Russian Academy of Science, 119991 Moscow, Russia.

|August 27, 2021

Summary

This summary is machine-generated.

Researchers developed a low-cost, high-resolution contact mask lithography technique by upgrading a standard optical microscope. This method enables rapid fabrication of micro-devices from 2D materials, even air-unstable ones, using a glove-box compatible kit.

Keywords:

2D materials Van der Waals heterostructures lithography mask lithography nanoelectronics

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Area of Science:

Materials Science
Nanotechnology
Microfabrication

Background:

Precise fabrication of micro-devices from 2D materials is crucial for discovering new functionalities.
Existing lithography systems can be expensive and inaccessible for many labs.

Purpose of the Study:

To demonstrate a fast, high-resolution, and cost-effective contact mask lithography method.
To enable micro-device fabrication using novel 2D materials and heterostructures.

Main Methods:

Upgrading a metallographic optical microscope with a simple kit for contact mask lithography.
Utilizing commercially available or lab-fabricated shadow masks.
Performing mask alignment and resist exposure within minutes.

Main Results:

Achieved micrometer resolution in micro-device fabrication.
The developed lithography kit is compact, glove-box compatible, and suitable for air-unstable materials.
The total cost of the kit components is approximately USD 200.

Conclusions:

This approach offers a convenient and affordable solution for microfabrication with 2D materials.
It democratizes access to lithographic techniques for research labs with limited resources.
Facilitates the exploration of novel functionalities in micro-devices based on 2D materials.