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Editorial for the Special Issue on Nanofabrication with Focused Electron/Ion Beam Induced Processing
1Institute of Molecular Science (ICMol), University of Valencia, 46980 Paterna, Spain.
Micromachines
|August 27, 2021
Abstract:
Focused electron beam (FEB) and focused ion beam (FIB) technologies have opened novel paths for material science research and technology at the micro and nano scales in recent decades [...].
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