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A Universal Positioning System for Coupling Characterization of SEM and AFM
Jinchao Liu1,2, Andi Wang1, Ji Yang1
1Analytical and Testing Center, South China University of Technology, Guangzhou 510641, China.
Scanning
|August 30, 2021
Summary
A new hyphenated technique enables precise, coupled characterization of nanomaterials using atomic force microscopy (AFM) and scanning electron microscopy (SEM). This universal positioning system achieves a 96% retrieval rate for microscale targets, enhancing material analysis.
Area of Science:
- Materials Science
- Analytical Chemistry
- Nanotechnology
Background:
- Hyphenated techniques are crucial for comprehensive material analysis.
- Coupled microscale characterization is essential for nanomaterial research.
Purpose of the Study:
- To develop a novel hyphenated technique for coupled atomic force microscopy (AFM) and scanning electron microscopy (SEM) characterization.
- To design a universal positioning system for accurate microscale analysis.
Main Methods:
- Developed a specimen holder with coordinate grids and conversion software.
- Integrated SEM and AFM by converting coordinate values between systems.
- Extracted and transformed coordinates from SEM to AFM for precise targeting.
Main Results:
- Achieved a 96% retrieval rate for a 1 µm spherical target within a 30 µm × 30 µm area.
- Demonstrated the system's accuracy and efficiency in microanalysis.
Conclusions:
- The developed hyphenated technique offers a universal, accurate, efficient, and cost-effective solution for microanalysis.
- This method has significant potential for advancing nanomaterial research and exploration.
