Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Concept Videos

Electronic Distance Measuring Instruments01:30

Electronic Distance Measuring Instruments

169
Electronic Distance Measuring Instruments (EDMs) are essential tools in modern surveying, offering precise distance measurements by emitting electromagnetic signals and calculating the time required for these signals to travel to a target and return. Two primary types of signals are used in EDMs — light waves and microwaves — each suited to specific environmental and distance requirements. Light-wave-based EDMs utilize either infrared or laser light, providing high accuracy over...
169
Galvanometer01:25

Galvanometer

2.4K
Common devices, including car instrument panels, battery chargers, and inexpensive electrical instruments, measure potential difference (voltage), current, or resistance using a d'Arsonval galvanometer. This electromechanical instrument is also known as a moving coil galvanometer.
The galvanometer consists of  two concave-shaped permanent magnets, providing a uniform radial magnetic field in the annular region. In the center, a pivoted coil of fine copper wire is placed in the uniform...
2.4K

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by
Same author

Application of deep learning strategies in the standardization and diagnostic efficiency enhancement of chest X-ray imaging.

BMC medical imaging·2026
Same author

8-O-acetylharpagide, an active compound isolated from <i>A. taiwanensis</i> selectively induced G2/M phase arrest and radiosensitivity in hypopharyngeal cancer cells.

Biochemistry and biophysics reports·2026
Same author

Development of an AI model for pneumothorax imaging: Dataset and model optimization strategies for real-world deployment.

European journal of radiology open·2025
Same author

Corrigendum to 'Utilizing an adenosine triphosphate bioluminescence assay as an indicator of instrument and environmental cleanliness in the radiology department - a pilot study' Infect Prev Pract, Volume 7 (2025) 100449.

Infection prevention in practice·2025
Same author

A Novel Analog Interpolation Method for Heterodyne Laser Interferometer.

Micromachines·2023
Same author

Generation of Mild Recombinants of Papaya Ringspot Virus to Minimize the Problem of Strain-Specific Cross-Protection.

Phytopathology·2021

Related Experiment Video

Updated: Oct 20, 2025

Implementation of a Nonlinear Microscope Based on Stimulated Raman Scattering
09:13

Implementation of a Nonlinear Microscope Based on Stimulated Raman Scattering

Published on: July 6, 2019

7.7K

Development of the Heterodyne Laser Encoder System for the X-Y Positioning Stage.

Chung-Ping Chang1, Tsung-Chun Tu1, Siang-Ruei Huang1

  • 1Department of Mechanical and Energy Engineering, National Chiayi University, Chiayi 600, Taiwan.

Sensors (Basel, Switzerland)
|September 10, 2021
PubMed
Summary

A new laser encoder system using a heterodyne laser interferometer effectively eliminates geometric errors in positioning stages. This high-resolution system meets stringent requirements for optoelectronic and semiconductor industries.

Keywords:
geometric errorheterodyne laser interferometerlaser encoderpositioning stage

More Related Videos

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
10:28

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Published on: July 5, 2016

10.5K
Measurement of Extracellular Ion Fluxes Using the Ion-selective Self-referencing Microelectrode Technique
09:18

Measurement of Extracellular Ion Fluxes Using the Ion-selective Self-referencing Microelectrode Technique

Published on: May 3, 2015

14.1K

Related Experiment Videos

Last Updated: Oct 20, 2025

Implementation of a Nonlinear Microscope Based on Stimulated Raman Scattering
09:13

Implementation of a Nonlinear Microscope Based on Stimulated Raman Scattering

Published on: July 6, 2019

7.7K
Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
10:28

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Published on: July 5, 2016

10.5K
Measurement of Extracellular Ion Fluxes Using the Ion-selective Self-referencing Microelectrode Technique
09:18

Measurement of Extracellular Ion Fluxes Using the Ion-selective Self-referencing Microelectrode Technique

Published on: May 3, 2015

14.1K

Area of Science:

  • Precision Engineering
  • Optical Metrology
  • Instrumentation Systems

Background:

  • Geometric errors in positioning stages limit precision in industries like optoelectronics and semiconductors.
  • Existing laser encoder systems may not fully address all types of geometric errors.
  • The need for high-accuracy, reliable positioning is critical for advanced manufacturing.

Purpose of the Study:

  • To develop a novel laser encoder system for precise geometric error elimination.
  • To integrate a heterodyne laser interferometer with an internal zero-point method for enhanced accuracy.
  • To validate the system's performance in a two-dimensional positioning stage.

Main Methods:

  • Utilized a heterodyne laser interferometer for high-resolution measurements.
  • Implemented an internal zero-point optical structure to compensate for geometric errors (positioning, straightness, squareness, Abbe).
  • Designed a signal processing system using commercial integrated circuits (ICs) for differential signal output.
  • Embedded the encoder system in a 27 mm × 27 mm two-dimensional positioning stage.

Main Results:

  • The proposed encoder system successfully eliminated various geometric errors.
  • Experimental positioning tests demonstrated a resolution of 15.8 nm.
  • Maximum positioning error and standard deviation were measured at 12.64 nm and 126.4 nm, respectively.
  • The system achieved high accuracy within the tested range.

Conclusions:

  • The developed laser encoder system effectively mitigates geometric errors in positioning stages.
  • The system's high precision and compatibility make it suitable for demanding industrial applications.
  • This technology advances positioning accuracy for optoelectronic and semiconductor manufacturing.