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Bioinspired Multifunctional Glass Surfaces through Regenerative Secondary Mask Lithography
Martyna Michalska1, Sophia K Laney1, Tao Li1
1Photonic Innovations Lab, Department of Electronic & Electrical Engineering, University College London, Torrington Place, London, WC1E 7JE, UK.
Advanced Materials (Deerfield Beach, Fla.)
|September 13, 2021
Summary
This study introduces regenerative secondary mask lithography for creating custom glass nanopillars. This novel method enables tunable nanofeature profiles for advanced applications like antireflectance and self-cleaning surfaces.
Area of Science:
- Materials Science
- Nanotechnology
- Surface Engineering
Background:
- Nature-inspired nanopatterning provides multifunctionality (antireflectance, repellency, antibacterial properties) dependent on nanofeature size and morphology.
- Patterning glass is challenging due to its inherent chemical and thermal stability.
Purpose of the Study:
- To develop a versatile method for creating customized glass nanopillars with tunable dimensions.
- To overcome the limitations of conventional glass patterning techniques.
Main Methods:
- Regenerative secondary mask lithography involving two steps: generation of sub-wavelength scalable soft etch masks and cyclic etching with a secondary organic mask.
- Dynamic nanoscale tunability of nanofeature side-wall profile and aspect ratio (>7).
Main Results:
- Achieved customized glass nanopillars with controlled aspect ratios and side-wall profiles.
- Demonstrated high etching selectivity (>1:32) through a cyclic etching process.
- Tailored glass features exhibited broadband omnidirectional antireflectivity, self-cleaning, and antibacterial activity against Staphylococcus aureus.
Conclusions:
- Regenerative secondary mask lithography offers a simple, versatile approach for advanced glass nanopatterning.
- The developed technique facilitates fundamental studies and practical applications in displays, architectural windows, and antimicrobial surfaces.
