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Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
Published on: December 7, 2015
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Low-temperature grown vertically aligned carbon nanotube array for an optimal infrared bolometer
Qi Wang1, Yu Zheng2, Changjian Zhou1,3
1School of Microelectronics, South China University of Technology, Guangzhou 510640, People's Republic of China.
Nanotechnology
|September 21, 2021
Summary
Vertically aligned carbon nanotube (VACNT) arrays were optimized for thermal photodetectors. Low-temperature growth achieved high absorption and fast response speeds, paving the way for infrared detector integration.
Area of Science:
- Materials Science
- Optoelectronics
- Nanotechnology
Background:
- Vertically aligned carbon nanotube (VACNT) arrays are investigated as absorbers for thermal-type photodetectors.
- Optimizing VACNT properties like height, density, and growth temperature is crucial for balancing high absorption rates with fast response speeds, essential for effective photodetector performance.
Purpose of the Study:
- To optimize VACNT arrays for thermal photodetectors by achieving a balance between high absorption and fast response speed.
- To develop a low-temperature fabrication process for VACNTs suitable for integration with sensitive photodetector materials.
Main Methods:
- Fabrication of VACNT arrays with varying heights and densities using a low-temperature plasma-enhanced chemical vapor deposition (PECVD) process.
- Measurement of absorption coefficients using Fourier transform infrared (FTIR) spectroscopy.
- Development and application of an effective medium theory (EMT) model to theoretically analyze VACNT absorption properties.
Main Results:
- VACNT arrays were successfully prepared with controlled heights and densities via low-temperature PECVD.
- Experimental absorption coefficients were measured and found to be comparable to theoretical values predicted by the EMT model using extracted CNT parameters.
- The study demonstrates a viable method for optimizing VACNT absorbers for photodetector applications.
Conclusions:
- Low-temperature PECVD is effective for fabricating optimized VACNT arrays for thermal photodetectors.
- The developed EMT model accurately predicts the absorption characteristics of VACNTs, aiding in material design.
- These findings provide a foundation for integrating advanced CNT-based absorbers into infrared photodetector technologies.

