Production Rates for Oxyfluorides SOF2, SO2F2, and SOF4 in SF6 Corona Discharges

R J Van Brunt1

  • 1National Bureau of Standards, Gaithersburg, MD 20899.

Summary

Corona discharges in sulfur hexafluoride (SF6) with oxygen and water produce abundant oxyfluorides. Their production rate is primarily limited by SF6 dissociation, not trace gas levels.

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