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Updated: Oct 19, 2025

Fabrication and Testing of Photonic Thermometers
Published on: October 24, 2018
Overcoming thermo-optical dynamics in broadband nanophotonic sensing
Mingkang Wang1,2, Diego J Perez-Morelo1,2, Vladimir Aksyuk1
1Microsystems and Nanotechnology Division, National Institute of Standards and Technology, Gaithersburg, MD 20899 USA.
Abstract:
Advances in integrated photonics open up exciting opportunities for batch-fabricated optical sensors using high-quality-factor nanophotonic cavities to achieve ultrahigh sensitivities and bandwidths. The sensitivity improves with increasing optical power; however, localized absorption and heating within a micrometer-scale mode volume prominently distorts the cavity resonances and strongly couples the sensor response to thermal dynamics, limiting the sensitivity and hindering the measurement of broadband time-dependent signals. Here, we derive a frequency-dependent photonic sensor transfer function that accounts for thermo-optical dynamics and quantitatively describes the measured broadband optomechanical signal from an integrated photonic atomic force microscopy nanomechanical probe. Using this transfer function, the probe can be operated in the high optical power, strongly thermo-optically nonlinear regime, accurately measuring low- and intermediate-frequency components of a dynamic signal while reaching a sensitivity of 0.7 fm/Hz1/2 at high frequencies, an improvement of ≈10× relative to the best performance in the linear regime. Counterintuitively, we discover that a higher transduction gain and sensitivity are achieved with lower quality-factor optical modes for low signal frequencies. Not limited to optomechanical transducers, the derived transfer function is generally valid for describing the small-signal dynamic responses of a broad range of technologically important photonic sensors subject to the thermo-optical effect.

