A Two-Axis Piezoresistive Force Sensing Tool for Microgripping.

Area of Science:

• Micro-robotics and Manipulation
• MEMS (Micro-Electro-Mechanical Systems)
• Sensor Technology

Background:

• Force sensing is crucial for micro-scale manipulation, where surface forces dominate.
• Existing microgrippers often lack multi-axis force sensing, limiting their dexterity.
• Coupled deformations at the micro-scale necessitate advanced sensing capabilities.

Purpose of the Study:

• To develop and validate a versatile, two-axis force sensing tool for microgripping applications.
• To address the complexities of single-wafer fabrication for micro-scale sensing and actuation.
• To enable precise micro-manipulation tasks through integrated force feedback.

Main Methods:

• Proposed a piezoresistive-based two-axis force sensing tool.
• Investigated a versatile manufacturing strategy with separate fabrication of passive and sensing parts.
• Utilized cleanroom microfabrication for device and electronics integration.
• Performed Finite Element Method (FEM) analysis and experimental validation.

Main Results:

• Achieved a sensing capability up to 9 mN along two axes with a resolution of 20 μN.
• Experimental validation demonstrated a measurement error within 1%.
• The fabricated sensing part is compatible with various passive gripper designs.

Conclusions:

• The developed instrumented microgripper offers high-precision, multi-axis force sensing for micro-manipulation.
• The versatile fabrication strategy allows for adaptable microgripper designs.
• The system provides reliable force feedback for complex micrograsping and release tasks.