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ZnO Thin Films Growth Optimization for Piezoelectric Application.

Vincent Polewczyk1, Riccardo Magrin Maffei2,3, Giovanni Vinai1

  • 1Laboratorio TASC, Istituto Officina dei Materiali (IOM)-CNR, 34149 Trieste, Italy.

Sensors (Basel, Switzerland)
|September 28, 2021
PubMed
Summary

Optimizing zinc oxide (ZnO) film fabrication enhances piezoelectric response in devices. Controlled sputtering gas and annealing improve film quality and surface roughness for better performance.

Keywords:
ZnOcrystallinitymagnetron sputteringmetal electrodespiezoelectricitysurface roughnessthin films

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Solid State Physics

Background:

  • The piezoelectric response of zinc oxide (ZnO) thin films is crucial for heterostructure-based devices.
  • Film structure and morphology significantly influence piezoelectric properties.
  • Optimizing ZnO fabrication is key to enhancing device performance.

Purpose of the Study:

  • To optimize the fabrication of piezoelectric ZnO thin films.
  • To reduce surface roughness and improve crystalline quality.
  • To investigate the influence of sputtering gas composition and thermal treatments on ZnO films.

Main Methods:

  • Atomic force microscopy (AFM) for surface roughness analysis.
  • X-ray diffraction (XRD) for crystalline quality assessment.
  • Piezoelectric force microscopy (PFM) to evaluate piezoelectric response.

Main Results:

  • Optimal surface roughness and crystalline quality achieved with 75% O2 in sputtering gas and deposition between room temperature and 573 K.
  • Subsequent annealing at 773 K further improved film quality.
  • Ti or Pt bottom electrodes maintained good surface and crystalline quality; Ti electrode resulted in unipolar orientation and homogenous displacement.

Conclusions:

  • Fabrication parameters significantly impact ZnO thin film properties for piezoelectric applications.
  • Optimized ZnO films exhibit a measurable piezoelectric response despite reduced thickness and grain size.
  • The choice of bottom electrode influences the piezoelectric behavior and orientation of ZnO films.