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An Improved Difference Temperature Compensation Method for MEMS Resonant Accelerometers.

Pengcheng Cai^1,2, Xingyin Xiong¹, Kunfeng Wang^1,2

¹The State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.

|September 28, 2021

Summary

This summary is machine-generated.

This study presents a novel temperature compensation method for differential resonant accelerometers. The technique significantly reduces temperature-induced frequency drift without extra sensors, improving accelerometer performance.

Keywords:

difference resonant accelerometer temperature compensation

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Area of Science:

Sensor Technology
Mechanical Engineering
Physics

Background:

Resonant accelerometers offer wide dynamic range and stability, with quasi-digital frequency output reducing noise susceptibility.
Differential structures enhance sensitivity and common noise rejection in resonant accelerometers.
Temperature fluctuations significantly impact resonant accelerometers, causing undesirable frequency drift.

Purpose of the Study:

To introduce an improved temperature compensation method for differential vibrating accelerometers.
To eliminate the need for additional temperature sensors in the compensation process.
To enhance the accuracy and reliability of resonant accelerometers under varying temperatures.

Main Methods:

Development of a novel temperature compensation algorithm tailored for differential resonant accelerometers.
Implementation of the compensation method without requiring external temperature sensing components.
Experimental validation of the proposed method on a prototype sensor.

Main Results:

The temperature sensitivity of the differential resonant accelerometer was drastically reduced.
Temperature sensitivity decreased from 43.16 ppm/°C to 0.83 ppm/°C.
Effective compensation was achieved across a temperature range of -10 °C to 70 °C.

Conclusions:

The proposed temperature compensation method effectively mitigates frequency drift in differential resonant accelerometers.
The technique enhances accelerometer performance by minimizing temperature-related errors.
This sensor technology advancement offers improved stability and accuracy for acceleration measurements.