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Pixel MTF response effect on non-null interferometry.

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    Pixel modulation transfer function degrades interferometric surface measurements. A novel multi-mode, multi-wavelength approach extends measurement range for challenging optical surfaces without sparse detectors.

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    Area of Science:

    • Optical Engineering
    • Metrology
    • Interferometry

    Background:

    • Pixel modulation transfer function (MTF) impacts contrast in interferometric surface figure measurements.
    • Sub-Nyquist and multiple-wavelength phase-shifting interferometry (MWPSI) are susceptible to MTF-induced signal degradation.
    • Accurate measurement of optical surfaces with high slope departures remains a challenge.

    Purpose of the Study:

    • To experimentally quantify the effect of pixel MTF on interferometric measurements across a wide spatial frequency range.
    • To identify and characterize the low signal-to-noise ratio (SNR) spatial frequency band.
    • To introduce and validate a novel interferometry approach for measuring surfaces with high slope departures.

    Main Methods:

    • Experimental quantification of pixel MTF effects on surface figure measurements from 0 to 363 lp/mm.
    • Characterization of the low SNR band as a low-pass filter for sub-Nyquist interferometry and a stop-band filter for MWPSI.
    • Development and testing of a multiple-mode, multiple-wavelength interferometry technique.

    Main Results:

    • Pixel MTF significantly degrades contrast, particularly at higher spatial frequencies.
    • A distinct low SNR band was identified, acting as a filter depending on the interferometry technique.
    • The proposed multi-mode, multi-wavelength approach successfully measured optical surfaces with high slope departures.

    Conclusions:

    • Pixel MTF is a critical factor affecting interferometric measurement accuracy, especially beyond the Nyquist limit.
    • The identified low SNR band necessitates specialized approaches for accurate metrology.
    • The novel multi-mode, multi-wavelength interferometry offers an extended measurement range for challenging optical surfaces without relying on sparse detectors.