Impact of threshold assessment methods in laser-induced damage measurements using the examples of CCD, CMOS, and DMD

Based on our earlier investigations, we continued and intensified our effort on the assessment of laser-induced damage effects in the visible range on a digital micromirror device (DMD) in comparison to different electro-optical imaging sensors such as complementary metal-oxide-semiconductors (CMOS) and charge-coupled devices (CCD). The main two objectives of our current work are: i) to fill the gap for the damage threshold regarding the time scale of picosecond pulses (527 nm) for CCD and CMOS devices and ii) evaluate the performance of a new device, the DMD, with both nanosecond pulses (532 nm) and picosecond pulses (527 nm) and compare the results with those of the CCD/CMOS. In the course of this research, we improved the experimental setup. Furthermore, we characterized the damage caused by laser pulse energies exceeding the laser-induced damage threshold (LIDT). For both the CMOS and CCD cameras, we received damage thresholds of about 10mJ/cm² (picosecond pulses). For the DMD, we obtained LIDT values of 130mJ/cm² (nanosecond laser pulses) and 1500mJ/cm² (picosecond laser pulses). In case of the CMOS devices, we additionally compared the appearance of the damage obtained from the output signal of the camera under test and the microscope images of the surface of the camera. The first visible changes on the surface of the sensor occurred at energy densities that are an order of magnitude higher than the threshold values related to the output signal.