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Single-detecting-path high-resolution displacement sensor based onself-interference effect of a single submicrometer

Jie Qi, Meimei Gong, Kunyang Xie

    Applied Optics
    |October 6, 2021
    PubMed
    Summary
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    This study presents a novel optical displacement sensor utilizing self-interference. The sensor achieves high resolution and accuracy for precise displacement measurements, enabling miniaturized systems.

    Area of Science:

    • Optics and Photonics
    • Nanotechnology
    • Metrology

    Background:

    • Optical displacement sensors are crucial for various industrial and scientific applications.
    • Existing sensors often face limitations in resolution, accuracy, or size.
    • Submicrometer gratings offer potential for novel optical sensing mechanisms.

    Purpose of the Study:

    • To demonstrate a high-resolution optical displacement sensor based on the self-interference effect.
    • To develop a compact, single-detecting-path system for precise displacement measurement.
    • To explore the potential of submicrometer gratings in advanced metrology.

    Main Methods:

    • Utilizing the self-interference effect between ±1st-order diffraction beams from a submicrometer grating.
    • Implementing a single-detecting-path system with a quadrant optoelectronic detector and an interpolation circuit.

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  • Experimentally measuring displacement within a 200 µm range.

    • Main Results:

    • Achieved a detecting sensitivity of 905.4°/µm.
    • Demonstrated an accuracy of ±1.9 µm.
    • In principle, achieved a resolution down to 41.1 pm with a subdividing factor of 9674.

    Conclusions:

    • A compact, high-resolution optical displacement sensor has been successfully demonstrated.
    • The developed sensor shows promise for miniaturized displacement measurement systems.
    • The self-interference principle offers a viable approach for advanced optical sensing.