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Integrated Si3N4 microresonator-based quantum light sources with high brightness using a subtractive wafer-scale

Kaiyi Wu, Qianni Zhang, Andrew W Poon

    Optics Express
    |October 7, 2021
    PubMed
    Summary

    Silicon nitride (Si3N4) integrated photonics enable efficient quantum light sources. A novel fabrication process yields high-quality Si3N4 microring resonators for heralded single-photon generation.

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    Area of Science:

    • Integrated quantum photonics
    • Materials science for photonics
    • Quantum optics

    Background:

    • Silicon nitride (Si3N4) offers advantages over silicon for integrated quantum photonics due to moderate optical nonlinearity and low optical loss.
    • Developing wafer-scale, crack-free, thick Si3N4 films using CMOS-compatible processes for quantum light sources remains a challenge.

    Purpose of the Study:

    • To demonstrate a unique subtractive fabrication process for a high-quality, thick silicon nitride platform.
    • To enable the development of dispersion-engineered quantum light sources on chip.

    Main Methods:

    • Introduction of a stress-release pattern before single Si3N4 film deposition.
    • Fabrication of 950 nm-thick, 8 μm-wide microring resonators supporting whispering-gallery modes.
    • Characterization of photon-pair generation rate, spectral brightness, and heralded single-photon measurements.

    Main Results:

    • Achieved a high photon-pair generation rate of approximately 1.03 MHz/mW².
    • Reported a high spectral brightness of approximately 5×10⁶ pairs/s/mW²/GHz.
    • Demonstrated the first heralded single-photon measurement on a Si3N4 platform with a high-quality conditional self-correlation gH⁽²⁾(0) of 0.008 ± 0.003.

    Conclusions:

    • The developed subtractive fabrication process enables high-performance silicon nitride integrated photonic circuits.
    • The Si3N4 platform is suitable for creating efficient quantum light sources, including heralded single-photon sources.
    • This work paves the way for advanced quantum photonic applications using silicon nitride.