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Related Experiment Video

Updated: Oct 17, 2025

Fabrication and Testing of Microfluidic Optomechanical Oscillators
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VO2-based micro-electro-mechanical tunable optical shutter and modulator.

José Figueroa, Henry Dsouza, Juan Pastrana

    Optics Express
    |October 7, 2021
    PubMed
    Summary
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    This study demonstrates novel vanadium dioxide (VO2)-based MEMS tunable optical shutters. These devices offer analog control over light intensity, surpassing the binary limitations of traditional shutters.

    Area of Science:

    • Materials Science
    • Microelectromechanical Systems (MEMS)
    • Optics and Photonics

    Background:

    • Traditional optical shutters are often limited to binary states (fully open or closed).
    • Vanadium dioxide (VO2) exhibits a phase transition with significant changes in optical and electrical properties, making it suitable for tunable optical devices.
    • MEMS technology allows for the fabrication of miniaturized mechanical and optical components.

    Purpose of the Study:

    • To demonstrate a novel MEMS tunable optical shutter utilizing VO2.
    • To investigate the analog tuning capabilities of VO2-based optical shutters.
    • To explore both mechanical and optical modulation of transmittance.

    Main Methods:

    • Fabrication of a MEMS device featuring a VO2-based cantilever and optical window with integrated resistive heaters.

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  • Optical transmittance measurements as a function of electrical current applied to the heaters.
  • Actuation of the cantilever for mechanical tuning and electrical modulation of the VO2 window for optical tuning.
  • Analysis of transmittance modulation under oscillating electrical input and DC-offset modulation.

    • Main Results:

    • Demonstrated analog optical shutter functionality with tunable light intensity within the VO2 phase transition range.
    • Achieved a 30% transmittance drop in the optical window and >30% tuning via cantilever actuation.
    • Showcased optical modulation with a 14% transmittance oscillation at 0.28 Hz.
    • Obtained transmittance modulation by exploiting the VO2 hysteresis loop.

    Conclusions:

    • VO2-based MEMS devices offer a promising platform for analog tunable optical shutters.
    • These shutters overcome the binary limitations of conventional mechanical shutters.
    • The integrated design allows for versatile control over optical transmittance through both mechanical and electrical means.