Dual-mode Fizeau interferometer with four-step phase-tilting iteration for dynamic optical measurement

Area of Science:

• Optical engineering
• Metrology
• Interferometry

Background:

• Conventional Fizeau interferometers face challenges in accommodating both anti-vibration and conventional measurement modes.
• Integrating these capabilities is crucial for dynamic optical measurement applications.

Purpose of the Study:

• To propose a dual-mode Fizeau interferometer (DFI) capable of both conventional and anti-vibration optical measurements.
• To develop a robust algorithm for accurate vibration phase extraction.

Main Methods:

• A vibration information measurement system was integrated into a conventional Fizeau interferometer.
• A four-step phase-tilting iteration algorithm was developed for vibration phase extraction.
• Simulations and experimental validations were conducted to assess performance.

Main Results:

• The proposed DFI successfully retains conventional measurement mode capabilities.
• The integrated system effectively separates vibration information while maintaining Fizeau interferometry accuracy.
• Both DFI modes demonstrated accurate phase recovery in simulations and experiments.

Conclusions:

• The developed DFI offers a viable solution for dynamic optical measurement challenges.
• The DFI exhibits significant potential for applications in optical topography measurement.
• The proposed algorithm enhances the accuracy of vibration phase extraction.