High precision integrated photonic thermometry enabled by a transfer printed diamond resonator on GaN waveguide chip

We demonstrate a dual-material integrated photonic thermometer, fabricated by high accuracy micro-transfer printing. A freestanding diamond micro-disk resonator is printed in close proximity to a gallium nitride on a sapphire racetrack resonator, and respective loaded Q factors of 9.1 × 10⁴ and 2.9 × 10⁴ are measured. We show that by using two independent wide-bandgap materials, tracking the thermally induced shifts in multiple resonances, and using optimized curve fitting tools the measurement error can be reduced to 9.2 mK. Finally, for the GaN, in a continuous acquisition measurement we record an improvement in minimum Allan variance, occurring at an averaging time four times greater than a comparative silicon device, indicating better performance over longer time scales.