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Related Experiment Video

Updated: Oct 17, 2025

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Interferometric measurement of high-order aspheric surface parameter errors based on a virtual-real combination

Qun Hao, Xin Tao, Yao Hu

    Optics Express
    |October 7, 2021
    PubMed
    Summary
    This summary is machine-generated.

    Accurately measuring aspheric surface parameter errors (SPEs) is crucial for manufacturing. This study introduces a novel interferometric method using a virtual-real combination iterative algorithm (VRCIA) to overcome challenges in measuring high-order aspheric surfaces.

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    Area of Science:

    • Optical Engineering
    • Metrology
    • Surface Science

    Background:

    • Aspheric surfaces are critical components in advanced optical systems, with their optical properties determined by precise surface parameters.
    • Measuring aspheric surface parameter errors (SPEs) presents significant challenges, particularly for high-order or convex surfaces, hindering precise fabrication.
    • Existing interferometric methods, while mature for figure error measurement, face limitations in accurately quantifying SPEs for complex aspheric forms.

    Purpose of the Study:

    • To develop and validate a novel interferometric measurement method for high-order aspheric surface parameter errors (SPEs).
    • To propose a measurement system integrating a partial compensation interferometer and a laser differential confocal system for enhanced SPE measurement.
    • To demonstrate the feasibility and accuracy of the proposed method for measuring SPEs on high-order convex aspheric surfaces.

    Main Methods:

    • Development of a virtual-real combination iterative algorithm (VRCIA) for calculating aspheric SPEs.
    • Implementation of a measurement system combining a partial compensation interferometer for wavefront acquisition and a laser differential confocal system for optimal distance determination.
    • Experimental validation using a high-order convex aspheric surface to assess the method's performance.

    Main Results:

    • The proposed interferometric method, utilizing VRCIA, successfully measures SPEs on high-order aspheric surfaces.
    • The measurement system effectively acquires partial compensated wavefronts and best compensation distances.
    • Achieved relative accuracies for vertex radius of curvature error, conic constant error, and fourth-order aspheric coefficient error were 0.025%, 0.095%, and 3.02%, respectively.

    Conclusions:

    • The developed virtual-real combination iterative algorithm (VRCIA) provides an effective solution for measuring high-order aspheric SPEs.
    • The proposed integrated measurement system enhances the accuracy and applicability of interferometry for complex aspheric surface metrology.
    • This method offers a significant advancement in the precise fabrication of advanced optical components requiring high-order aspheric surfaces.