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Updated: Oct 17, 2025

The Generation of Higher-order Laguerre-Gauss Optical Beams for High-precision Interferometry
Published on: August 12, 2013
Quantification and reduction of Poisson-Gaussian mixed noise induced errors in ellipsometry
Abstract:
Ellipsometry is an important metrology tool in a plethora of industries. The measurement accuracy can be significantly affected by the existence of Poisson-Gaussian mixed noise. This paper quantifies the induced error on normalized Mueller matrix measurements through statistical analysis. A method is then proposed to mitigate the effects of Poisson-Gaussian noise in spectroscopic ellipsometry signal demodulation, based on maximum likelihood estimation. The noise is characterized through experiments on an in-house setup. The improved performance of dimension reconstruction from the proposed method is demonstrated through simulations.
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