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Quantification and reduction of Poisson-Gaussian mixed noise induced errors in ellipsometry.

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    Summary

    This study addresses Poisson-Gaussian mixed noise impacting ellipsometry measurements. A new method using maximum likelihood estimation effectively reduces noise in spectroscopic ellipsometry, improving data accuracy.

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    Area of Science:

    • Optics and Photonics
    • Metrology
    • Statistical Analysis

    Background:

    • Ellipsometry is a critical metrology technique across various industries.
    • Measurement accuracy in ellipsometry is compromised by Poisson-Gaussian mixed noise.
    • Mueller matrix measurements are particularly susceptible to noise-induced errors.

    Purpose of the Study:

    • To statistically analyze and quantify errors in normalized Mueller matrix measurements caused by Poisson-Gaussian noise.
    • To propose and validate a novel method for mitigating Poisson-Gaussian noise in spectroscopic ellipsometry signal demodulation.
    • To experimentally characterize the noise and demonstrate the efficacy of the proposed method via simulations.

    Main Methods:

    • Statistical analysis to quantify error in normalized Mueller matrix measurements.
    • Development of a maximum likelihood estimation (MLE) based method for noise mitigation.
    • Experimental characterization of Poisson-Gaussian mixed noise using an in-house setup.
    • Simulations to evaluate the performance improvement in dimension reconstruction.

    Main Results:

    • Quantification of measurement errors induced by Poisson-Gaussian mixed noise.
    • Demonstration of a novel MLE-based method for effective noise reduction in spectroscopic ellipsometry.
    • Experimental validation of noise characteristics.
    • Significant improvement in dimension reconstruction accuracy shown through simulations.

    Conclusions:

    • The proposed maximum likelihood estimation method effectively mitigates Poisson-Gaussian noise in spectroscopic ellipsometry.
    • The developed technique enhances the accuracy of normalized Mueller matrix measurements.
    • This work provides a robust solution for improving the reliability of ellipsometry metrology in noisy environments.